Planarization of Surface of Aluminium Nitride Substrate with Thin Silicon Oxide Film
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 1996
ISSN: 0914-5400,1882-1022
DOI: 10.2109/jcersj.104.719